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Proceedings Paper

Integrated sensor arrays with a configurable network interface for chemical and biological detection
Author(s): Karl D. Hirschman; Marie Archer; Deoram Persaud; Vimalan Rajalingam; Jeffrey Clarkson; Jason Mann; Daniel Phillips; Wei Sun; Philippe M. Fauchet
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Paper Abstract

Sensors based on macroporous silicon (M-PSI) have demonstrated the ability to detect the presence of certain chemical and biological materials. The devices utilize silicon sensing membranes with deep trench structures (macropores) formed by electrochemical etching to depths up to 100μm. The sensor structure is unique in that it exploits the vertical dimension of the planar silicon substrate, utilizing the large internal surface area of the membrane as the active sensing region. Upon exposure to organic solvents (i.e. ethanol, acetone, benzene) the devices exhibit a characteristic impedance signature. Discrimination is achieved by recognizing a specific response characteristic, or by placing appropriate probe materials to provide an electrically detectable signal upon exposure to the target substance. M-PSi sensing devices have demonstrated an electrical response to DNA hybridization and shown discrimination between binding and non-binding events. The size of the pores in the sensing elements can host larger molecules such as proteins, which extends the use of the devices to other fields of biotechnology. The sensors have been designed and fabricated in array configurations. A flexible electronics interface platform has been developed to accommodate the use of the sensors for a variety of applications.

Paper Details

Date Published: 8 December 2004
PDF: 8 pages
Proc. SPIE 5591, Lab-on-a-Chip: Platforms, Devices, and Applications, (8 December 2004); doi: 10.1117/12.580572
Show Author Affiliations
Karl D. Hirschman, Rochester Institute of Technology (United States)
Marie Archer, Univ. of Rochester (United States)
Deoram Persaud, Rochester Institute of Technology (United States)
Vimalan Rajalingam, Rochester Institute of Technology (United States)
Jeffrey Clarkson, Rochester Institute of Technology (United States)
Jason Mann, Rochester Institute of Technology (United States)
Daniel Phillips, Rochester Institute of Technology (United States)
Wei Sun, Univ. of Rochester (United States)
Philippe M. Fauchet, Univ. of Rochester (United States)

Published in SPIE Proceedings Vol. 5591:
Lab-on-a-Chip: Platforms, Devices, and Applications
Linda A. Smith; Daniel Sobek, Editor(s)

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