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Proceedings Paper

Rapid optical figuring of aspherical surfaces with plasma-assisted chemical etching
Author(s): Lynn David Bollinger; G. Steinberg; Charles B. Zarowin
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Paper Abstract

Programmed motion of a tool which removes material by plasma assisted chemical etching (PACE) gives controlled, deterministic figuring. The process has been automated to correct arbitrary figure errors on aspheric surfaces directly from the measured surface data. A system is now operating for figuring aspheric surfaces up to 0.5 m diameter. PACE can greatly reduce the time and cost of figuring large optics by its rapid convergence to the final figure requiring only two to three measurement/figuring cycles to reach 1/50 wave surfaces. PACE intrinsically smooths high frequency roughness with material removal leaving a surface free of subsurface damage

Paper Details

Date Published: 26 March 1992
PDF: 8 pages
Proc. SPIE 1618, Large Optics II, (26 March 1992); doi: 10.1117/12.58037
Show Author Affiliations
Lynn David Bollinger, Hughes Danbury Optical Systems, Inc. (United States)
G. Steinberg, Hughes Danbury Optical Systems, Inc. (United States)
Charles B. Zarowin, Hughes Danbury Optical Systems, Inc. (United States)

Published in SPIE Proceedings Vol. 1618:
Large Optics II
Robert E. Parks, Editor(s)

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