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Proceedings Paper

Glass microprocessing by laser-induced plasma-assisted ablation: fundamental to industrial applications
Author(s): Koji Sugioka; Katsumi Midorikawa; Hiroshi Yamaoka; Yutaka Gomi; Masayoshi Otsuki; Ming Hui Hong; Dong Jiang Wu; Lai Lee Wong; Tow Chong Chong
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Paper Abstract

Laser-induced plasma-assisted ablation (LIPAA), in which a single conventional pulsed laser of small size is employed (typically 2nd harmonic of Nd:YAG laser), enables to process transparent materials like glass with micron order spatial resolution, high speed and low cost. In this process, a laser beam is first directed to a glass substrate placed in vacuum or air. The laser beam passes through the substrate since the wavelength of laser beam must have no absorption by the substrate for the LIPAA process. The transmitted laser beam is absorbed by a solid target (typically metal) located behind the substrate. The target is then ablated, resulting in plasma generation. Due to the interaction of the laser beam and the laser-induced plasma, significant ablation takes place at the rear surface of substrate. This process demonstrates surface microstructuring, crack-free marking, color marking, painting and selective metallization of glass. Based on these achievements, we have developed a prototype of workstation of LIPAA microfabrication system which is now commercially available. The discussion includes mechanism and practical applications in industry of LIPAA process.

Paper Details

Date Published: 15 July 2004
PDF: 10 pages
Proc. SPIE 5506, Nonresonant Laser-Matter Interaction (NLMI-11), (15 July 2004); doi: 10.1117/12.580222
Show Author Affiliations
Koji Sugioka, RIKEN-The Institute of Physical and Chemical Research (Japan)
Katsumi Midorikawa, RIKEN-The Institute of Physical and Chemical Research (Japan)
Hiroshi Yamaoka, Marubun Corp. (Japan)
Yutaka Gomi, Marubun Corp. (Japan)
Masayoshi Otsuki, Marubun Corp. (Japan)
Ming Hui Hong, National Univ. of Singapore (Singapore)
Dong Jiang Wu, National Univ. of Singapore (Singapore)
Lai Lee Wong, National Univ. of Singapore (Singapore)
Tow Chong Chong, National Univ. of Singapore (Singapore)

Published in SPIE Proceedings Vol. 5506:
Nonresonant Laser-Matter Interaction (NLMI-11)
Mikhail N. Libenson, Editor(s)

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