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Proceedings Paper

Influence of object structure on the accuracy of 3-D systems for metrology
Author(s): Donald J. Svetkoff; Donald B.T. Kilgus
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Paper Abstract

Progress in the development of 3D systems for inspection and measurement has resulted in new systems using several imaging techniques. Requirements for sub-pixel inspection accuracy are now common throughout the industry, mandating a thorough examination of sensor performance limits. The biggest challenge for any 3D system is accurate measurement of object location and height when the intrascene dynamic range is large. This paper examines several fundamental sources of error in 3D systems, particularly imaging errors found near object edges. The results are important for development of 3D metrology system specifications.

Paper Details

Date Published: 1 March 1992
PDF: 13 pages
Proc. SPIE 1614, Optics, Illumination, and Image Sensing for Machine Vision VI, (1 March 1992); doi: 10.1117/12.57990
Show Author Affiliations
Donald J. Svetkoff, Synthetic Vision Systems (United States)
Donald B.T. Kilgus, Synthetic Vision Systems (United States)

Published in SPIE Proceedings Vol. 1614:
Optics, Illumination, and Image Sensing for Machine Vision VI
Donald J. Svetkoff, Editor(s)

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