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Proceedings Paper

Nanoparticle production line with in situ control of the chemical composition, size, and morphology of nanoscale particles
Author(s): Gotze H. Popov; Yuri O. Glukhoy
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Paper Abstract

The thermal plasma method for producing of nanoparticles provides higher throughput compared to the other methods. The synthesis of nanoparticles in a thermal plasma reactor is a two-step process, including precursor dissociation and the nucleation and growth of the produced particles. In the present paper we describe the design of a production line based on the thermal plasma method for producing of nanoparticles. The use of a DC-RF-RF hybrid plasma torch, a non-destructive and non-invasive diagnostics, and in-situ control ensure the production of high-quality products.

Paper Details

Date Published: 19 January 2005
PDF: 7 pages
Proc. SPIE 5592, Nanofabrication: Technologies, Devices, and Applications, (19 January 2005); doi: 10.1117/12.579234
Show Author Affiliations
Gotze H. Popov, Nanomat, Inc. (United States)
Yuri O. Glukhoy, Nanomat, Inc. (United States)

Published in SPIE Proceedings Vol. 5592:
Nanofabrication: Technologies, Devices, and Applications
Warren Y-C. Lai; Stanley Pau; O. Daniel Lopez, Editor(s)

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