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Proceedings Paper

A three-dimensional waveguide structure as a support for genomic and proteomic microarrays
Author(s): Stephan K. Dertinger; Marco Kluehr; Christian A. Elsner; Alexander Sauermann; Kristin Rueffer; Petra M. Nicklaus; Kerstin Thein
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Paper Abstract

In this paper we present a three-dimensional waveguide structure with unique optical and fluidic properties and demonstrate its application as a substrate for DNA microarrays. The structure is fabricated by thermal oxidation of a macroporous silicon membrane with a periodic pattern of discrete pores running perpendicular through the substrate. Partial oxidation generates a SiO2 membrane, but leaves a rectangular grid of silicon walls dividing the membrane into compartments. We show that the SiO2 walls act as optical waveguides and characterize their optical properties; modes can be launched using Koehler illumination. The silicon walls optically isolate adjacent compartments and prevent light from spreading laterally in the membrane. In a DNA hybridization experiment, the detection of 100 attomol of a Cy-3 labeled DNA fragment (17 oligonucleotides) has been achieved with a signal to noise ratio of > 3:1. We believe that even lower detection limits can be achieved by further tuning the optical parameters of the three-dimensional waveguide structure.

Paper Details

Date Published: 8 December 2004
PDF: 8 pages
Proc. SPIE 5591, Lab-on-a-Chip: Platforms, Devices, and Applications, (8 December 2004); doi: 10.1117/12.578532
Show Author Affiliations
Stephan K. Dertinger, Infineon Technologies AG (Germany)
Marco Kluehr, Infineon Technologies AG (Germany)
Christian A. Elsner, Infineon Technologies AG (Germany)
Alexander Sauermann, Infineon Technologies AG (Germany)
Kristin Rueffer, Infineon Technologies AG (Germany)
Petra M. Nicklaus, Infineon Technologies AG (Germany)
Kerstin Thein, Infineon Technologies AG (Germany)

Published in SPIE Proceedings Vol. 5591:
Lab-on-a-Chip: Platforms, Devices, and Applications
Linda A. Smith; Daniel Sobek, Editor(s)

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