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Proceedings Paper

Analysis of the structures and characteristics for an InP-based micromechanical tunable filter
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Paper Abstract

In this letter,a InP-based micromechanical tuneable filter by electrostatic actuation is introduced. Through simulation of the DBR reflectance spectra and the F-P cavity transimission spectra,the filter performance is studied. By means of finite element method,the tunning characteristics of the filters based on several typical micromechanical structures are presented. The dynamical behavior of the top mirror is investigated.In addition,the flatness of the top mirror are compared among these structures. It would be valuable reference for InP-based micromechanical F-P cavity device design and optimization.

Paper Details

Date Published: 30 December 2004
PDF: 9 pages
Proc. SPIE 5641, MEMS/MOEMS Technologies and Applications II, (30 December 2004); doi: 10.1117/12.578453
Show Author Affiliations
Bin Chen, Beijing Univ. of Posts and Telecommunications (China)
Zhen Zhou, Beijing Univ. of Posts and Telecommunications (China)
Yongqing Huang, Beijing Univ. of Posts and Telecommunications (China)
Xiaomin Ren, Beijing Univ. of Posts and Telecommunications (China)

Published in SPIE Proceedings Vol. 5641:
MEMS/MOEMS Technologies and Applications II
Zhichun Ma; Guofan Jin; Xuyuan Chen, Editor(s)

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