Proceedings Paper
Advances in interferometric wavefront-measuring technology through the direct measuring interferometry method| Format | Member Price | Non-Member Price |
|---|---|---|
| $17.00 | $21.00 |
Paper Abstract
With the invention of a new phase measuring technique, 'Direct Measuring Interferometry' (DMI), almost all practical difficulties of quantitative interferometry in production environment are solved to a large extent.
Paper Details
Date Published: 1 April 1992
PDF: 4 pages
Proc. SPIE 1573, Commercial Applications of Precision Manufacturing at the Sub-Micron Level, (1 April 1992);
Published in SPIE Proceedings Vol. 1573:
Commercial Applications of Precision Manufacturing at the Sub-Micron Level
Lionel R. Baker, Editor(s)
PDF: 4 pages
Proc. SPIE 1573, Commercial Applications of Precision Manufacturing at the Sub-Micron Level, (1 April 1992);
Show Author Affiliations
Michael F. Kuechel, Carl Zeiss (Germany)
Published in SPIE Proceedings Vol. 1573:
Commercial Applications of Precision Manufacturing at the Sub-Micron Level
Lionel R. Baker, Editor(s)
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