Proceedings Paper
Overview: sensitive techniques for surface measurement and characterization| Format | Member Price | Non-Member Price |
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Paper Abstract
A brief overview is given of the papers presented in the session on Measurement and Characterization. Then techniques are mentioned that are appropriate for quantifying precision manufactured surfaces at the sub-micron level. The new techniques of atomic probe microscopy and long scan profilometers are highlighted.
Paper Details
Date Published: 1 April 1992
PDF: 7 pages
Proc. SPIE 1573, Commercial Applications of Precision Manufacturing at the Sub-Micron Level, (1 April 1992); doi: 10.1117/12.57756
Published in SPIE Proceedings Vol. 1573:
Commercial Applications of Precision Manufacturing at the Sub-Micron Level
Lionel R. Baker, Editor(s)
PDF: 7 pages
Proc. SPIE 1573, Commercial Applications of Precision Manufacturing at the Sub-Micron Level, (1 April 1992); doi: 10.1117/12.57756
Show Author Affiliations
Jean M. Bennett, Naval Weapons Ctr. (United States)
Published in SPIE Proceedings Vol. 1573:
Commercial Applications of Precision Manufacturing at the Sub-Micron Level
Lionel R. Baker, Editor(s)
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