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Proceedings Paper

Micromachining-based fiber-coupled variable optical attenuator
Author(s): Huiming Yan; Zhonghui Cao; Xingkun Wu
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Paper Abstract

A design of micromachining based direct-coupled variable optical attenuator (VOA) is presented. The device, fabricated by using CNC engraving and laser spot welding techniques, operates by misaligning a fiber-to-fiber coupling through a lateral displacement of one of the fibers mounted on a micro-machined flexure driven electromagnetically. An FET software package ANSYS was employed to optimize micro-mechanical structure and simulation of the device operation was described in detail. The measured performance of a VOA prototype is reported, featuring a fast dynamic response (<2.3 ms), great dynamic range (0~65dB) and wide bandwidth.

Paper Details

Date Published: 17 January 2005
PDF: 6 pages
Proc. SPIE 5644, Optoelectronic Devices and Integration, (17 January 2005); doi: 10.1117/12.577310
Show Author Affiliations
Huiming Yan, Zhejiang Univ. (China)
Zhonghui Cao, Zhejiang Univ. (China)
Xingkun Wu, Zhejiang Univ. (China)

Published in SPIE Proceedings Vol. 5644:
Optoelectronic Devices and Integration
Hai Ming; Xuping Zhang; Maggie Yihong Chen, Editor(s)

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