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Proceedings Paper

Experimental research on thickness-monitoring techniques of non-quarter films
Author(s): Xiaohui Zhang; Xiaodan Gao; Jionghui Rao
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Paper Abstract

The precise control of the film thickness in the film deposition process is the key to depositing optical coating, it is difficult to get ideal film thickness by general turn-point value monitoring. The characteristics of four film thickness monitoring techniques, quartz crystal monitoring technique and common reflectance overshoot-turning point monitoring technique and turn-point monitoring technique with different monitoring wavelength at each layer and mutative overshoot-turning point monitoring technique, are analyzed in this thesis. The contrast experiments adopting the four monitoring techniques respectively to a non-quarter A.R. coating were made under the same technical condition. The experiment results have indicated that mutative overshoot-turning point monitoring technique can get more precise thickness control to non-quarter films than the other thickness monitoring techniques.

Paper Details

Date Published: 10 February 2005
PDF: 6 pages
Proc. SPIE 5638, Optical Design and Testing II, (10 February 2005); doi: 10.1117/12.576190
Show Author Affiliations
Xiaohui Zhang, Naval Univ. of Engineering (China)
Xiaodan Gao, Naval Univ. of Engineering (China)
Jionghui Rao, Naval Univ. of Engineering (China)

Published in SPIE Proceedings Vol. 5638:
Optical Design and Testing II
Yongtian Wang; Zhicheng Weng; Shenghua Ye; Jose M. Sasian, Editor(s)

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