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Proceedings Paper

Microfabrication assisted by laser-trapped microparticle tools
Author(s): Jian Bai; Zen-rong Zhu-ge; Xiao-na Wang; Xiyun Hou; Guoguang Yang
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Paper Abstract

A novel micro-fabrication technology using optical radiation pressure is presented. A simulation program has been written and simulation results have demonstrated that micro silica or diamond particles, trapped by focused laser beam, could be used as micro-fabrication tools for nanometer manufacturing. An experiment setup for laser trapping has been established and Silica particles, with diameter of 8 μm, has been successfully trapped in water and arbitrary-shaped diamond particles, whose size is about 3-8 μm, has been trapped and rotated as micro-fabrication tools. When trapped rigidity micro-particles tools was controlled by laser beam, the work stage was horizontally moved repeatedly so that a machining trace of 2nm on work piece has been attained.

Paper Details

Date Published: 30 December 2004
PDF: 8 pages
Proc. SPIE 5641, MEMS/MOEMS Technologies and Applications II, (30 December 2004); doi: 10.1117/12.576129
Show Author Affiliations
Jian Bai, Zhejiang Univ. (China)
Zen-rong Zhu-ge, Zhejiang Univ. (China)
Xiao-na Wang, Chinese Metrology College (China)
Xiyun Hou, Zhejiang Univ. (China)
Guoguang Yang, Zhejiang Univ. (China)

Published in SPIE Proceedings Vol. 5641:
MEMS/MOEMS Technologies and Applications II
Zhichun Ma; Guofan Jin; Xuyuan Chen, Editor(s)

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