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Proceedings Paper

Design of electrostatically levitated micromachined rotational gyroscope based on UV-LIGA technology
Author(s): Feng Cui; Wenyuan Chen; Yufeng Su; Weiping Zhang; Xiaolin Zhao
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Paper Abstract

The prevailing micromachined vibratory gyroscope typically has a proof mass connected to the substrate by a mechanical suspension system, which makes it face a tough challenge to achieve tactical or inertial grade performance levels. With a levitated rotor as the proof mass, a micromachined rotational gyroscope will potentially have higher performance than vibratory gyroscope. Besides working as a moment rebalance dual-axis gyroscope, the micromachined rotational gyroscope based on a levitated rotor can simultaneously work as a force balance tri-axis accelerometer. Micromachined rotational gyroscope based on an electrostatically levitated silicon micromachined rotor has been notably developed. In this paper, factors in designing a rotational gyro/accelerometer based on an electrostatically levitated disc-like rotor, including gyroscopic action of micro rotor, methods of stable levitation, micro displacement detection and control, rotation drive and speed control, vacuum packaging and microfabrication, are comprehensively considered. Hence a design of rotational gyro/accelerometer with an electroforming nickel rotor employing low cost UV-LIGA technology is presented. In this design, a wheel-like flat rotor is proposed and its basic dimensions, diameter and thickness, are estimated according to the required loading capability. Finally, its micromachining methods based on UV-LIGA technology and assembly technology are discussed.

Paper Details

Date Published: 30 December 2004
PDF: 12 pages
Proc. SPIE 5641, MEMS/MOEMS Technologies and Applications II, (30 December 2004); doi: 10.1117/12.575632
Show Author Affiliations
Feng Cui, Shanghai Jiaotong Univ. (China)
Wenyuan Chen, Shanghai Jiaotong Univ. (China)
Yufeng Su, Shanghai Jiaotong Univ. (China)
Weiping Zhang, Shanghai Jiaotong Univ. (China)
Xiaolin Zhao, Shanghai Jiaotong Univ. (China)

Published in SPIE Proceedings Vol. 5641:
MEMS/MOEMS Technologies and Applications II
Zhichun Ma; Guofan Jin; Xuyuan Chen, Editor(s)

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