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Proceedings Paper

Measurement of opaque film’s surface profile by broadband-light interference methods
Author(s): Yongkai Zhu; Yan Sun; Hong Zhao; Wang Zhao
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Paper Abstract

A new method based on the principle of broadband-light interference, which combines reflected spectrum analysis and optical fiber techniques, is proposed to measure surface profile of opaque film. The testing system mainly consists of a Michelson interferometer. Incident light is split into a reference beam and an input beam to the sample. When two lights reflected from the surface of film and mirror may interfere within the range of broadband light coherent length, the output of interference patterns is measured by a spectrograph. The optical path difference of the sample point and the reference mirror is tested by analyzing the interference pattern. When the reference mirror is fixed, the relative thickness value of different measuring points on the film's surface is achieved by scanning the film's surface. Its testing range is from 0.2 micron to less than 20 micron. According to the relative thickness data, the film’s surface profile is obtained. The result shows that the testing error of this method is within 2 nm. This method has the advantages over the other measuring method, such as nondestructive, higher accuracy and simple structure.

Paper Details

Date Published: 14 February 2005
PDF: 6 pages
Proc. SPIE 5634, Advanced Sensor Systems and Applications II, (14 February 2005); doi: 10.1117/12.574327
Show Author Affiliations
Yongkai Zhu, Xi'an Jiaotong Univ. (China)
Yan Sun, Engineering Univ. of Air Force (China)
Hong Zhao, Xi'an Jiaotong Univ. (China)
Wang Zhao, Xi'an Jiaotong Univ. (China)

Published in SPIE Proceedings Vol. 5634:
Advanced Sensor Systems and Applications II
Yun-Jiang Rao; Osuk Y. Kwon; Gang-Ding Peng, Editor(s)

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