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Proceedings Paper

The experimental study of super-smooth surface processing technology for optical glass and sapphire component
Author(s): Chijuan Li; Jingling Xiao
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Paper Abstract

This paper describes the super smooth surface optical processing methods for optical glass and sapphire components. The super smooth surfaces of optical glass through BFP (Bowl-Feed Polishing) method and sapphire through CMP (Chemo-Mechanical Polishing) method are produced respectively. Microstructures of each processing steps are measured through non-contact method with Zygo NV5022s. Finally, the experimental results are given: the roughness of both optical glass and sapphire component is around 0.5nm (rms or Ra).

Paper Details

Date Published: 9 February 2005
PDF: 12 pages
Proc. SPIE 5635, Nanophotonics, Nanostructure, and Nanometrology, (9 February 2005); doi: 10.1117/12.573998
Show Author Affiliations
Chijuan Li, North China Research Institute of Electro-Optics (China)
Jingling Xiao, North China Research Institute of Electro-Optics (China)

Published in SPIE Proceedings Vol. 5635:
Nanophotonics, Nanostructure, and Nanometrology
Xing Zhu; Stephen Y. Chou; Yasuhiko Arakawa, Editor(s)

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