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Proceedings Paper

Ultrahighly accurate 3D profilometer
Author(s): Hideki Tsutsumi; Keiichi Yoshizumi; Hiroyuki Takeuchi
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Paper Abstract

We have developed an Ultrahigh-Accurate 3-D Profilometer (UA3P), which, using a new, in-house-developed atomic force probe, has an accuracy of 10 nm. It is capable of measuring corners as small as 2 micro meter in radius and can cover an area up to 400 x 400 x 90 (mm), providing a powerful boost to nano-level processing. A commercial product was introduced in 1994. Examples of the key components made possible by this technology include aspherical lenses (used for a Blu-ray Disc device, a next-generation DVD, digital cameras, cellular phones, optical communications), free form lenses (used for frennel lens common to CD and DVD, laser printer lens, multi focus glass lens, cubic phase plate to extend depth of focus), gigabit semiconductor wafers, hard discs, air conditioner scroll vanes, DVC cylinders. The premiere ultra high-precision three-dimensional profilometer delivers superb performance using a variety of micro-measurements for a wide range of applications.

Paper Details

Date Published: 10 February 2005
PDF: 8 pages
Proc. SPIE 5638, Optical Design and Testing II, (10 February 2005); doi: 10.1117/12.573774
Show Author Affiliations
Hideki Tsutsumi, Matsushita Electric Industrial Co., Ltd. (Japan)
Keiichi Yoshizumi, Matsushita Electric Industrial Co., Ltd. (Japan)
Hiroyuki Takeuchi, Matsushita Electric Industrial Co., Ltd. (Japan)

Published in SPIE Proceedings Vol. 5638:
Optical Design and Testing II
Yongtian Wang; Zhicheng Weng; Shenghua Ye; Jose M. Sasian, Editor(s)

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