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Proceedings Paper

Investigation on long-range nanometer resolution grating moiré interferometer
Author(s): Xingchun Chu; Haibao Lu; Tinzheng Chen; Juliang Cao
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Paper Abstract

A moiré interferometer system based on single metrology grating (SMG) that can achieve nanometer resolution is presented. By properly selecting the diffraction beam, different resolution can be realized with different diffracting orders. The measuring principle is described in detail. A new moiré fringes subdividing method is developed. This method can accurately deal with input signals which deviate from the orthogonal state by dynamically tracing the joints of input signals. So the stringent requirement for orthogonality of input signals is loosen. With the combination of the SMG and new subdividing method, the system can easily achieve nanometer resolution. A displacement measuring system, which resolution is 1nm and measure range is 400mm, is set up. And the experiment results of the system are given. It shows that the system has better anti-jamming ability to the orthogonal error of input signals than conventional systems.

Paper Details

Date Published: 9 February 2005
PDF: 9 pages
Proc. SPIE 5635, Nanophotonics, Nanostructure, and Nanometrology, (9 February 2005); doi: 10.1117/12.573294
Show Author Affiliations
Xingchun Chu, National Univ. of Defense Technology (China)
Haibao Lu, National Univ. of Defense Technology (China)
Tinzheng Chen, National Univ. of Defense Technology (China)
Juliang Cao, National Univ. of Defense Technology (China)

Published in SPIE Proceedings Vol. 5635:
Nanophotonics, Nanostructure, and Nanometrology
Xing Zhu; Stephen Y. Chou; Yasuhiko Arakawa, Editor(s)

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