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Proceedings Paper

Spectrophotometer for measuring spectral transmittance and reflectance of large-aperture optical element
Author(s): Jun Liu; Haifeng Li; Xu Liu; Peifu Gu
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Paper Abstract

It is a difficult task to measure the optical uniformity of an optical coating with very large aperture. Here an automatic near-UV/VIS/NIR spectrophotometer has been developed for spectrum analysis of optical coatings on very large aperture optical elements. It can give two-dimensional scanning result of a sample with substrate surface size of 600mm*350mm and 70mm thickness. The testing beam can be s- or p-polarized, at an incident angle from 0° to 70°. The equipment is composed of optical system, mechanical structure, photo-translating module and computer control system. Because of the light deflection after passing through the very thick sample, an integrating sphere and a sphere moving structure was involved. The measuring beam is guided in a quartz fiber with a special interface that can improve coupling efficiency from the monochromator to fiber. The two-dimensional scanning work platform has the position accuracy about 0.05mm and a reproducibility of 0.01mm. The beam incident angle accuracy is controlled within 0.1°. The measurement results show that in the near-UV/VIS/NIR region, the overall photometric accuracy can get 0.1% and 0.2% for transmittance and reflectance, respectively. The wavelength scale is accurate to be within 0.4nm with a reproducibility of 0.05nm.

Paper Details

Date Published: 10 February 2005
PDF: 8 pages
Proc. SPIE 5638, Optical Design and Testing II, (10 February 2005); doi: 10.1117/12.571857
Show Author Affiliations
Jun Liu, Zhejiang Univ. (China)
Haifeng Li, Zhejiang Univ. (China)
Xu Liu, Zhejiang Univ. (China)
Peifu Gu, Zhejiang Univ. (China)


Published in SPIE Proceedings Vol. 5638:
Optical Design and Testing II
Yongtian Wang; Zhicheng Weng; Shenghua Ye; Jose M. Sasian, Editor(s)

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