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Proceedings Paper

Fabrication of a waveguide for biomedical applications using novel micromachining techniques
Author(s): Mona R. Safadi; Andrew J. Scott; Jagdish Thakur; Gregory W. Auner
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Paper Abstract

The fabrication parameters necessary for the development of waveguides that transmit energy from deep ultraviolet to infrared range on wide band gap semiconductor thin film is discussed. Such waveguides in conjunction with microfluidic systems may be used for a spatial and temporal drug delivery in neural tissue. These waveguides may also be suitably modified and employed for novel applications like lab-on-a-chip technologies for Raman Spectroscopy and high speed telecommunication optical switches. Highly textured AlN thin films are grown on C-plane sapphire with high refractive index buffer layer by plasma source molecular beam epitaxy (PSMBE). Analytical measurements such as atomic force microscopy (AFM), ultraviolet spectroscopy and X-ray diffraction, were used to characterize surface morphology and crystalline structure of these films. The fabrication of waveguide structures was performed using laser micromachining with a KrF Excimer laser of wavelength 248 nm and pulse duration of 25ns. Waveguide etching rate for the AlN thin films is investigated as a function laser pulse energy and number of pulses. It is found that etching rate increases almost linearly with both--the pulse energy and number of pulses.

Paper Details

Date Published: 7 December 2004
PDF: 9 pages
Proc. SPIE 5588, Smart Medical and Biomedical Sensor Technology II, (7 December 2004); doi: 10.1117/12.571718
Show Author Affiliations
Mona R. Safadi, Wayne State Univ. (United States)
Andrew J. Scott, Wayne State Univ. (United States)
U.S. Army Research, Development and Engineering Command (United States)
Jagdish Thakur, Wayne State Univ. (United States)
Gregory W. Auner, Wayne State Univ. (United States)

Published in SPIE Proceedings Vol. 5588:
Smart Medical and Biomedical Sensor Technology II
Brian M. Cullum, Editor(s)

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