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Proceedings Paper

Design and performance of a self-sensing, self-actuating piezoelectric monomorph with interdigitated electrodes
Author(s): Yong K. Hong; Heung-Keun Park; Sung Q Lee; Kee S. Moon; Raghav R. Vanga; Miguel Levy
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Paper Abstract

A smart cantilever structure using single-crystal relaxor ferroelectric material is presented. The smart cantilever possesses both sensing and actuation capabilities, embedded in a monomorph and resulting in a smart structure. Single crystal relaxor ferroelectric materials (1-x)Pb(Zn1/3Nb2/3)O3-xPbTiO3 (PZN-PT) and (1-x)Pb(Mg1/3Nb2/3)O3-xPbTiO3 (PMN-PT) are ideal for actuator and sensor applications since they exhibit very high piezoelectric coefficients. We separately pattern interdigitated electrodes on the top and bottom surfaces of a single crystal cantilever beam. The interdigitated electrode design results in an electric field- gradient that after poling not only induces flapping actuation but also, simultaneously, allows us to detect internally or externally induced stresses. As a monolithic actuator integrated with a sensor, it has potential applications in various Micro-Electro-Mechanical Systems (MEMS), Scanning Probe Microscopy (SPM) and Near-field Scanning Optical Microscopy (NSOM). We fabricate monomorph prototypes and characterize their performance in terms of actuation displacement and sensing capabilities, respectively. Finally, an active vibration control experiment was successfully conducted by using the smart cantilever structure.

Paper Details

Date Published: 25 October 2004
PDF: 8 pages
Proc. SPIE 5602, Optomechatronic Sensors, Actuators, and Control, (25 October 2004); doi: 10.1117/12.571569
Show Author Affiliations
Yong K. Hong, Michigan Technological Univ. (United States)
Heung-Keun Park, Michigan Technological Univ. (United States)
Sung Q Lee, Electronics and Telecommunications Research Institute (South Korea)
Kee S. Moon, Michigan Technological Univ. (United States)
Raghav R. Vanga, Michigan Technological Univ. (United States)
Miguel Levy, Michigan Technological Univ. (United States)

Published in SPIE Proceedings Vol. 5602:
Optomechatronic Sensors, Actuators, and Control
Kee S. Moon, Editor(s)

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