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Proceedings Paper

Polymer microlens array integrated with imaging sensors by UV-molding technique
Author(s): Jianjun Lai; Yue Zhao; Caijun Ke; Xinjian Yi; TianXu Zhang
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Paper Abstract

Fabrication of Polymer microlens array based on UV-molding techniques is presented. UV-molding enables for the integration of polymer microlens array on top of arbitrary substrates like glass, silicon other polymeric films. In this technique, photoresist or glass mold is first fabricated by conventional photolithnic method and subsequently served as transparent replication tool. UV curable polymer resin is then coated on patterned or unpatterned substrates and a contact mask aligner is used to align substrates and replication mold tool and then make the mold immersed into the resin. Replication of polymer on substrates is achieved by UV photopolymerisation of the resin. Resin thickness and gap distance between mold and substrate are carefully controlled in order to obtain acceptable thickness of cured polymer base. The UV molding technique was used to molding of a polymer film carring microlens array on the surface of an experimental CCD imaging sensor chip in this paper to enhance its fill factor and sensitivity.

Paper Details

Date Published: 17 January 2005
PDF: 6 pages
Proc. SPIE 5644, Optoelectronic Devices and Integration, (17 January 2005);
Show Author Affiliations
Jianjun Lai, Huazhong Univ. of Science and Technology (China)
Yue Zhao, Huazhong Univ. of Science and Technology (China)
Caijun Ke, Huazhong Univ. of Science and Technology (China)
Xinjian Yi, Huazhong Univ. of Science and Technology (China)
TianXu Zhang, Huazhong Univ. of Science and Technology (China)

Published in SPIE Proceedings Vol. 5644:
Optoelectronic Devices and Integration
Hai Ming; Xuping Zhang; Maggie Yihong Chen, Editor(s)

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