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Proceedings Paper

Development of high-precision laser heterodyne metrology gauges
Author(s): Feng Zhao
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Paper Abstract

Laser interferometers with better than10 picometer (pm) accuracy in displacement measurement and 1-3 microns in absolute distance ranging accuracy are sought in several of NASA's planned missions, such as the Space Interferometry Mission (SIM) and Terrestrial Planet Finder (TPF). Over the past several years, we have made significant progress at JPL toward a laser heterodyne interferometer system that can provide both picometer displacement measurement and micron level absolute distance measurement. This paper presents an review on the development of high precision metrology gauges for these missions.

Paper Details

Date Published: 14 February 2005
PDF: 13 pages
Proc. SPIE 5634, Advanced Sensor Systems and Applications II, (14 February 2005); doi: 10.1117/12.569844
Show Author Affiliations
Feng Zhao, Jet Propulsion Lab. (United States)

Published in SPIE Proceedings Vol. 5634:
Advanced Sensor Systems and Applications II
Yun-Jiang Rao; Osuk Y. Kwon; Gang-Ding Peng, Editor(s)

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