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Proceedings Paper

Novel process to fabricate 3D microstructures joined with microchannel for microfluidic application
Author(s): Weisong Wang; Jackie Chen; Ji Fang
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Paper Abstract

A novel process of casting the polydimethyl-siloxane (PDMS) microstructure with hybrid photoresists mold has been developed to fabricate the 3D microstructure. This new processing includes two parts: the 3D mother mold fabrication and PDMS casting processing. The 3D mother mold, which consists of the three-dimensional partial-spherical microstructure and micro channel, was successfully fabricated and characterized. The 3D micro structure and the micro channel of the mother mold, made of two different photosensitive materials, AZ100XT and SU8 photoresist respectively, are merged very smoothly at the joint area. A mother mold of a 2200-μm-diameter chamber with a 500-μm-width channel was presented in this paper. For the best precise dimensional control, we used this mother mold to fabricate the PDMS mold for PDMS casting processing. The surface average roughness of the final 3D structure is 30 nm. This novel processing provides a new technology for achieving smooth 3D chamber surface joined with microchannel. This new technology can be applied in various lab-on-a-chip and microfluidic devices such as micropump and microvalve for which the great sealing, no dead volume and high back pressure are critical requirements. In this paper, the design, fabrication process and surface profile characterizations of this processing are presented in details.

Paper Details

Date Published: 8 December 2004
PDF: 6 pages
Proc. SPIE 5591, Lab-on-a-Chip: Platforms, Devices, and Applications, (8 December 2004); doi: 10.1117/12.569836
Show Author Affiliations
Weisong Wang, Louisiana Tech Univ. (United States)
Jackie Chen, Louisiana Tech Univ. (United States)
Ji Fang, Louisiana Tech Univ. (United States)

Published in SPIE Proceedings Vol. 5591:
Lab-on-a-Chip: Platforms, Devices, and Applications
Linda A. Smith; Daniel Sobek, Editor(s)

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