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Proceedings Paper

Study on application and analysis of a microaccelerometer with magnetorheological fluids
Author(s): Zhonghua Lin; Huinan Hong; Guoqing Hu; Wenyan Liu; Huijie Zhang; Lingling Lin
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Paper Abstract

A new type microaccelerometer with magnetorheological (MR) fluids is presented in this paper. MR fluids can easily change from a fluid state to a semi-solid state in milliseconds when exposed to magnetic field. They are applied to the microaccelerometer where the MR fluids can vary the relative dielectric constant and provide damping. Then the electrostatic force has been adopted in the microaccelerometer for balancing force. Therefore, the measurement range of the microaccelerometer will be expanded. The mathematical model of the microaccelerometer with MR fluids is derived. The curve of the accelerometer between the deflection of the silicon doubly-supported beam and voltage has been simulated. The curves of the accelerometer between the voltage and the acceleration are also got. Last, the stability of the microaccelerometer system has been analyzed.

Paper Details

Date Published: 30 December 2004
PDF: 7 pages
Proc. SPIE 5641, MEMS/MOEMS Technologies and Applications II, (30 December 2004); doi: 10.1117/12.569574
Show Author Affiliations
Zhonghua Lin, Xiamen Univ. (China)
Huinan Hong, Zhangzhou Institute of Computer Application and Research (China)
Guoqing Hu, Xiamen Univ. (China)
Wenyan Liu, Xiamen Univ. (China)
Huijie Zhang, Xiamen Univ. (China)
Lingling Lin, Xiamen Univ. (China)

Published in SPIE Proceedings Vol. 5641:
MEMS/MOEMS Technologies and Applications II
Zhichun Ma; Guofan Jin; Xuyuan Chen, Editor(s)

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