A financially successful mask operation must be able to economically integrate both volume and leading edge product into the production line. A computer model that approximates the total cost of ownership of various tools has been developed which can provide necessary insight to make sound business decisions. Costs associated with various ebeam and laser exposure tools are presented. Such site specific items as local taxes, financing options, labor rates, floor space, utilities, insurance, throughput and uptime are input variables. The model was developed for use with Microsoft's EXCEL on PC based systems and Apple's Macintosh.

Date Published: 1 January 1992
PDF: 11 pages
Proc. SPIE 1604, 11th Annual BACUS Symposium on Photomask Technology, (1 January 1992); doi: 10.1117/12.56952

Published in SPIE Proceedings Vol. 1604:
11th Annual BACUS Symposium on Photomask Technology
Kevin C. McGinnis, Editor(s)