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Proceedings Paper

Holographic apparatus for forming nanograting device
Author(s): Yung Hsin Chen; Wann Diing Tyan; Pong Lai; Ying Tsung Lu
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Paper Abstract

This paper studies the fabrication of the nano-scale grating using laser beam interference. The beams come from a He-Cd laser @442nm were interfered with each other inside a prism, and form the interference pattern on the photoresist layer that coated on the bottom of the prism. The method can fabricate gratings with period that less than the half of the wavelength of the interference laser beams. It becomes a promising process that can fabricate a grating with periods of 160nm without using UV light source. The experimental result is also demonstrated.

Paper Details

Date Published: 7 February 2005
PDF: 7 pages
Proc. SPIE 5636, Holography, Diffractive Optics, and Applications II, (7 February 2005); doi: 10.1117/12.569243
Show Author Affiliations
Yung Hsin Chen, Industrial Technology Research Institute (Taiwan)
Wann Diing Tyan, Industrial Technology Research Institute (Taiwan)
Pong Lai, Industrial Technology Research Institute (Taiwan)
Ying Tsung Lu, Industrial Technology Research Institute (Taiwan)

Published in SPIE Proceedings Vol. 5636:
Holography, Diffractive Optics, and Applications II
Yunlong Sheng; Dahsiung Hsu; Chongxiu Yu; Byoungho Lee, Editor(s)

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