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Proceedings Paper

Effects of F2 concentration on the degradation of discharge-pumped KrF laser output
Author(s): Qihong Lou
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Paper Abstract

By measuring the effects of halogen concentration on the lifetime of KrF excimer laser, the impurities effects on the laser output performance are analyzed. The experimental results also show that the degration of halogen concentration is related to the laser resonator conditions.

Paper Details

Date Published: 1 February 1992
PDF: 6 pages
Proc. SPIE 1620, Laser Testing and Reliability, (1 February 1992); doi: 10.1117/12.56864
Show Author Affiliations
Qihong Lou, Shanghai Institute of Optics and Fine Mechanics (China)

Published in SPIE Proceedings Vol. 1620:
Laser Testing and Reliability
David L. Begley; S. C. Wang, Editor(s)

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