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Proceedings Paper

Chrome dry etching for 65-nm node mask manufacturing
Author(s): Thomas Faure; Emily Fisch; Cuc Huynh; Shaun Crawford
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Paper Abstract

A new chrome etch system was acquired and implemented to manufacture 65 nm node critical level masks. The etch performance of FEP 171, ZEP 7000, NEB 22, and REAP 200 resist systems in this new chrome etch system was evaluated. The critical dimension (CD) uniformity, etch bias, and etch linearity of this new etch system relative to the older generation etch system is presented. Implementation of the new etch system resulted in a 40-60 nm reduction in etch bias with no degrade in CD uniformity performance. In addition, it was found that the etch contribution to CD linearity was reduced by 50%. Detailed characterization of both macroloading and microloading etch effects was performed and showed substantial improvement relative to the previous generation etch system. The change in chrome etch rate as a function of etch area was reduced by 50%, improving mean to target CD performance on new designs. Implementation of the new etch system has enabled achievement of CD and defect density performance requirements for 65 nm node mask manufacturing. The results presented in this paper were collected during the process development phase and are not necessarily representative of the final optimized process.

Paper Details

Date Published: 6 December 2004
PDF: 12 pages
Proc. SPIE 5567, 24th Annual BACUS Symposium on Photomask Technology, (6 December 2004); doi: 10.1117/12.568539
Show Author Affiliations
Thomas Faure, IBM Corp. (United States)
Emily Fisch, IBM Corp. (United States)
Cuc Huynh, IBM Corp. (United States)
Shaun Crawford, IBM Corp. (United States)

Published in SPIE Proceedings Vol. 5567:
24th Annual BACUS Symposium on Photomask Technology
Wolfgang Staud; J. Tracy Weed, Editor(s)

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