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Proceedings Paper

Factors in the design and selection of vibration-sensitive equipment
Author(s): Norman Owen; Reuben Hale
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Paper Abstract

The microelectronics industry must address a number of important issues when attempting to avoid vibration problems in the design and selection of vibration-sensitive equipment. An effective design methodology is described. Vibration requirements from selected vendors are compared and found to vary greatly in both form and content. Two different proposed vibration ''standards'' are compared.

Paper Details

Date Published: 1 February 1992
PDF: 15 pages
Proc. SPIE 1619, Vibration Control in Microelectronics, Optics, and Metrology, (1 February 1992); doi: 10.1117/12.56825
Show Author Affiliations
Norman Owen, San Francisco State Univ. (United States)
Reuben Hale, Response Dynamics (United States)


Published in SPIE Proceedings Vol. 1619:
Vibration Control in Microelectronics, Optics, and Metrology
Colin G. Gordon, Editor(s)

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