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Proceedings Paper

OASIS: progress on implementing the new stream format for containing data size explosion
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Paper Abstract

The data volumes of individual files used in the manufacture of modern integrated circuits have become unmanageable using existing data formats specifications. The ITRS roadmap indicates that single layer MEBES files in 2004 exceed 200 GB threshold, worst case. OASIS, the new stream format developed under the sponsorship of SEMI, has been approved in the industry-wide voting in June 2003. The new format that on average will reduce the file size by an order of magnitude, enables to streamline data flows and provides increased efficiency in data exchange. The work to implement the new format into software tools is in progress. This paper gives an overview on the new format, reports results on data volume reduction and is a report on the status and benefits the new format can deliver. A data flow relying on OASIS as the input and transfer format is discussed.

Paper Details

Date Published: 2 June 2004
PDF: 7 pages
Proc. SPIE 5504, 20th European Conference on Mask Technology for Integrated Circuits and Microcomponents, (2 June 2004); doi: 10.1117/12.568027
Show Author Affiliations
Steffen F. Schulze, Mentor Graphics Corp. (United States)
Kent H. Nakagawa, DuPont Photomasks, Inc. (United States)
Peter D. Buck, DuPont Photomasks, Inc. (United States)

Published in SPIE Proceedings Vol. 5504:
20th European Conference on Mask Technology for Integrated Circuits and Microcomponents
Uwe F. W. Behringer, Editor(s)

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