
Proceedings Paper
Fabrication of sub-micron gratings in ultrathin films by 157-nm laser ablation and their application as grating waveguide structuresFormat | Member Price | Non-Member Price |
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Paper Abstract
Submicron surface-relief gratings were fabricated in ultrathin dielectric films by F2-laser ablation. Projection mask imaging by a Schwarzschild objective applying nanosecond duration pulses from a high-resolution 157-nm optical processing system generated 780-nm-period gratings in various thin oxide layers. The grating modulation depths were controlled within tens of nanometers by applying suitable energy densities and number of pulses. Thus, high-resolution laser ablation proves to be a promising alternative approach to well-known lithographic methods for the fabrication of submicron-period gratings in thin films.
Such gratings are the most critical component of grating waveguide structures (GWS) that comprise of a substrate, a thin waveguide, and a grating layer in a planar multilayer structure. Interference effects in a GWS will provide high reflection efficiency under resonance conditions for an ideal grating with no absorption losses. The resonance spectral responses of the F2-laser ablated gratings have been investigated using an ultrashort-pulse titanium-sapphire laser. Their potential for optical applications will be shown and discussed. GWS are attractive for optical switches or modulators, narrow-band spectral filters, high reflectivity mirrors, bio-sensor chips and many other applications.
Paper Details
Date Published: 9 December 2004
PDF: 9 pages
Proc. SPIE 5578, Photonics North 2004: Photonic Applications in Astronomy, Biomedicine, Imaging, Materials Processing, and Education, (9 December 2004); doi: 10.1117/12.567350
Published in SPIE Proceedings Vol. 5578:
Photonics North 2004: Photonic Applications in Astronomy, Biomedicine, Imaging, Materials Processing, and Education
Marc Nantel; Glen Herriot; Graham H. McKinnon; Leonard MacEachern; Robert A. Weersink; Rejean Munger; Andrew Ridsdale, Editor(s)
PDF: 9 pages
Proc. SPIE 5578, Photonics North 2004: Photonic Applications in Astronomy, Biomedicine, Imaging, Materials Processing, and Education, (9 December 2004); doi: 10.1117/12.567350
Show Author Affiliations
Mark A. Bader, Laser-Lab. Gottingen e.V. (Germany)
Christoph Kappel, Laser-Lab. Gottingen e.V. (Germany)
Andre Selle, Laser-Lab. Gottingen e.V. (Germany)
Christoph Kappel, Laser-Lab. Gottingen e.V. (Germany)
Andre Selle, Laser-Lab. Gottingen e.V. (Germany)
Jurgen Ihlemann, Laser-Lab. Gottingen e.V. (Germany)
Mi Li Ng, Univ. of Toronto (Canada)
Peter Robert Herman, Univ. of Toronto (Canada)
Mi Li Ng, Univ. of Toronto (Canada)
Peter Robert Herman, Univ. of Toronto (Canada)
Published in SPIE Proceedings Vol. 5578:
Photonics North 2004: Photonic Applications in Astronomy, Biomedicine, Imaging, Materials Processing, and Education
Marc Nantel; Glen Herriot; Graham H. McKinnon; Leonard MacEachern; Robert A. Weersink; Rejean Munger; Andrew Ridsdale, Editor(s)
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