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Proceedings Paper

High-resolution surface plasmon measurements: a sensitive probe for thickness and structural information of ultrathin films
Author(s): Uwe Albrecht; H. Dilger; P. Evers; Paul Leiderer
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Paper Abstract

We describe the use of optically excited surface plasmons to measure the thickness of ultrathin films deposited on gold and silver surfaces with submonolayer resolution. Additional structural information on the film is obtained by looking at the scattering of the surface plasmons. Applications of this method to physisorbed and quench-condensed molecular hydrogen films and to spreading of liquids are presented.

Paper Details

Date Published: 1 January 1992
PDF: 7 pages
Proc. SPIE 1594, Process Module Metrology, Control and Clustering, (1 January 1992); doi: 10.1117/12.56648
Show Author Affiliations
Uwe Albrecht, Univ. Konstanz (Germany)
H. Dilger, Univ. Konstanz (Germany)
P. Evers, Univ. Konstanz (Germany)
Paul Leiderer, Univ. Konstanz (Germany)

Published in SPIE Proceedings Vol. 1594:
Process Module Metrology, Control and Clustering
Cecil J. Davis; Irving P. Herman; Terry R. Turner, Editor(s)

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