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Proceedings Paper

In-situ diagnostics, monitoring, and metrology
Author(s): Glenn Engel; Pat Solomon
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Paper Abstract

Ultra Large Scale Integrated (ULSI) device requirements constantly challenge the technological frontiers of equipment capabilities. In order to have high uptime it is now required for machines to contain a certain level of intelligence. By utilizing on-board diagnostics, the equipment is able to inform operators of the change in the status of the equipment before a hard failure occurs. This is particularly important in high volume manufacturing where it is not acceptable to incur hard failures which can cause production losses. Drytek has developed software which incorporates in situ diagnostics and monitoring in order to meet the needs of today's leading edge IC manufacturers. These products allow for user definable parameters to be monitored in real-time, both on the tool and through a SECS I and II protocol port for host computer communications. This paper describes Drytek's approach to onboard diagnostics and process monitoring and presents the benefits and uses of such on-board capabilities.

Paper Details

Date Published: 1 January 1992
PDF: 3 pages
Proc. SPIE 1594, Process Module Metrology, Control and Clustering, (1 January 1992); doi: 10.1117/12.56634
Show Author Affiliations
Glenn Engel, Drytek Inc. (United States)
Pat Solomon, Drytek Inc. (United States)

Published in SPIE Proceedings Vol. 1594:
Process Module Metrology, Control and Clustering
Cecil J. Davis; Irving P. Herman; Terry R. Turner, Editor(s)

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