Share Email Print

Proceedings Paper

Seeing more, looking at less: applications of IR microscopy
Author(s): Peter Grosse; Lukas Kuepper; Wolfgang Theiss
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

Applications of IR microscopy in solid state physics are shown, namely, the investigations of layer thickness variations in semiconductor systems and of the scattering characteristics of small particles, both making use of the ability to take spectra from small sample spots.

Paper Details

Date Published: 1 March 1992
PDF: 2 pages
Proc. SPIE 1575, 8th Intl Conf on Fourier Transform Spectroscopy, (1 March 1992); doi: 10.1117/12.56457
Show Author Affiliations
Peter Grosse, RWTH Aachen (Germany)
Lukas Kuepper, RWTH Aachen (Germany)
Wolfgang Theiss, RWTH Aachen (Germany)

Published in SPIE Proceedings Vol. 1575:
8th Intl Conf on Fourier Transform Spectroscopy
Herbert Michael Heise; Ernst Heiner Korte; Heinz W. Siesler, Editor(s)

© SPIE. Terms of Use
Back to Top
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research
Forgot your username?