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Proceedings Paper

Planar parabolic refractive lenses for hard x-rays: technological aspects of fabrication
Author(s): Vyacheslav Yunkin; Maxim V. Grigoriev; Serguei Kuznetsov; Anatoly A. Snigirev; Irina I. Snigireva
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Paper Abstract

Planar parabolic refractive lenses are becoming the key optical elements for many hard x-ray microprobe and microscopy applications at third generation synchrotron radiation sources (e.g. the ESRF), as well as they are promising candidates for future X-ray free-electron lasers. In this paper we review all technological limitations taking place during fabrication of silicon and non-silicon refractive lenses and propose some approaches to overcome these limitations in order to fabricate high performance refractive lenses in terms of aperture, gain and focal spot size etc. We propose to use low-temperature silicon bonding techniques as alternative for very deep etching. Combination of two etched silicon structures by bonding of two lenses with relief to relief doubles the lens relief depth.

Paper Details

Date Published: 4 November 2004
PDF: 9 pages
Proc. SPIE 5539, Design and Microfabrication of Novel X-Ray Optics II, (4 November 2004); doi: 10.1117/12.563253
Show Author Affiliations
Vyacheslav Yunkin, Institute of Microelectronics Technology (Russia)
Maxim V. Grigoriev, Institute of Microelectronics Technology (Russia)
Serguei Kuznetsov, Institute of Microelectronics Technology (Russia)
Anatoly A. Snigirev, European Synchrotron Radiation Facility (France)
Irina I. Snigireva, European Synchrotron Radiation Facility (France)

Published in SPIE Proceedings Vol. 5539:
Design and Microfabrication of Novel X-Ray Optics II
Anatoly A. Snigirev; Derrick C. Mancini, Editor(s)

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