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Proceedings Paper

Grazing angle microscopy: a new technique for surface analysis
Author(s): John A. Reffner; William T. Wihlborg; M. C. Sweeney
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Paper Abstract

Grazing angle spectroscopy (GAS) has been extended to microscopic sampling areas by a special objective lens and an FT-IR research microscope. While the advantages of grazing incidence for the study of thin films on metals has been known and applied since the mid-1960s, GAS measurements have been limited to samples with large smooth flat surfaces. The grazing angle microscope objective reduces the scale of GAS samples from centimeters to micrometers. This reduction of the sampling area makes it possible to analyze samples with either small or irregular surfaces. In this work, specific examples are presented to illustrate that micro-GAS can yield useful data from samples too small or too irregularly shaped for conventional GAS. Specific examples of micro-GAS analyses are a lubricant film on a ball bearing, a surface film on an LDEF test panel, a boric acid solid lubricant on steel, and a polycarbonate-aluminum bonding surface.

Paper Details

Date Published: 1 March 1992
PDF: 3 pages
Proc. SPIE 1575, 8th Intl Conf on Fourier Transform Spectroscopy, (1 March 1992); doi: 10.1117/12.56325
Show Author Affiliations
John A. Reffner, Spectra-Tech, Inc. (United States)
William T. Wihlborg, Spectra-Tech, Inc. (United States)
M. C. Sweeney, Spectra-Tech Europe Ltd. (United Kingdom)

Published in SPIE Proceedings Vol. 1575:
8th Intl Conf on Fourier Transform Spectroscopy
Herbert Michael Heise; Ernst Heiner Korte; Heinz W. Siesler, Editor(s)

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