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Proceedings Paper

Compact XUV excimer radiation sources and their application
Author(s): Andrei V. Fedenev; Andrei Morozov; Jochen Wieser; Andreas Ulrich
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Paper Abstract

Low energy electron beam excitation of dense helium and neon was used for light production in the extreme ultraviolet (XUV) wavelength range. The entire system was completely filled with the working gas avoiding the use of vacuum equipment for light production, propagation and detection. Emission spectra from He and Ne are dominated by the second continua with peak intensities at 80 and 83 nm, respectively. The hydrogen Lyman-α line was observed as the dominant impurity line. This XUV light source was used for transmission measurements of LiF near its absorption edge.

Paper Details

Date Published: 3 May 2004
PDF: 8 pages
Proc. SPIE 5483, Atomic and Molecular Pulsed Lasers V, (3 May 2004); doi: 10.1117/12.563015
Show Author Affiliations
Andrei V. Fedenev, High Current Electronics Institute (Russia)
Andrei Morozov, Technische Univ. Munchen (Germany)
Jochen Wieser, TuiLaser AG (Germany)
Andreas Ulrich, Technische Univ. Munchen (Germany)

Published in SPIE Proceedings Vol. 5483:
Atomic and Molecular Pulsed Lasers V
Victor F. Tarasenko, Editor(s)

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