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Proceedings Paper

Mechanical stresses studied by optical methods in diamond-like carbon films containing Si and O
Author(s): Ivan Ohlidal; Miloslav Ohlidal; Daniel Franta; Vladimir Cudek; Vilma Bursikova; Martin Siler
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Paper Abstract

In this paper the quantitative dependence of the mechanical stress inside diamond-like carbon films containing Si and O atoms on a flow rate ratio of methane CH4 and hexamethyldisiloxane C6H18Si2O in the deposition mixture is determined. For this purpose the modified Stoney's formula is employed. The important quantities taking place in this formula, i.e. the radius of curvature of the spherical surface of a deformed silicon substrate because of the film stress and the film thickness, are determined using the combined optical method based on two-beam interferometry, variable angle spectroscopic ellipsometry and near-normal spectroscopic reflectometry. It is shown that the influence of the flow rate ratio on the values of the mechanical stresses taking place inside these films is negligible within the experimental accuracy achieved for determining these stresses if the total flow rate of gases used to be constant in the deposition mixture. A discussion of this fact is also performed. The film studied were prepared using the plasma enhanced chemical vapor deposition.

Paper Details

Date Published: 29 September 2004
PDF: 9 pages
Proc. SPIE 5527, Advances in Thin Film Coatings for Optical Applications, (29 September 2004); doi: 10.1117/12.562136
Show Author Affiliations
Ivan Ohlidal, Masaryk Univ. (Czech Republic)
Miloslav Ohlidal, Brno Univ. of Technology (Czech Republic)
Daniel Franta, Masaryk Univ. (Czech Republic)
Vladimir Cudek, Brno Univ. of Technology (Czech Republic)
Vilma Bursikova, Masaryk Univ. (Czech Republic)
Martin Siler, Masaryk Univ. (Czech Republic)

Published in SPIE Proceedings Vol. 5527:
Advances in Thin Film Coatings for Optical Applications
Jennifer D. T. Kruschwitz; James B. Oliver, Editor(s)

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