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Proceedings Paper

Small catadioptric microscope optics
Author(s): David R. Shafer; Yung-Ho Chuang; Joseph J. Armstrong
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Paper Abstract

New catadioptric objectives have been developed with large bandwidths in the DUV, high numerical apertures (NAs), and small size. This can be achieved using a single glass material. Designs are specifically optimized for loose alignment tolerances and ease of manufacturability. Applications include broad band DUV imaging and high resolution immersion imaging for industrial microscopy and life sciences.

Paper Details

Date Published: 14 October 2004
PDF: 7 pages
Proc. SPIE 5523, Current Developments in Lens Design and Optical Engineering V, (14 October 2004); doi: 10.1117/12.561002
Show Author Affiliations
David R. Shafer, David Shafer Optical Design (United States)
Yung-Ho Chuang, KLA-Tencor Corp. (United States)
Joseph J. Armstrong, KLA-Tencor Corp. (United States)

Published in SPIE Proceedings Vol. 5523:
Current Developments in Lens Design and Optical Engineering V
Pantazis Z. Mouroulis; Warren J. Smith; R. Barry Johnson, Editor(s)

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