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Proceedings Paper

Aberration characterization using frequency domain analysis of low-coherence interferograms
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Paper Abstract

The processing of low-coherence interferometric signals in the frequency domain generates multiple images of an object surface, each image corresponding to a distinct wavelength or illumination angle. The detection of the motion of object features between images provides a direct measure of the net effect of chromatic and some geometric imaging aberrations. The data are presented as vector plots showing the motion of the centroid of imaging ray bundles as a function of wavelength or illumination angle, and as a function of field position. The correlation technique developed for this application resolves feature motions smaller than the optical resolution of the imaging system. The approach is applied to the characterization of high and low numerical aperture interference microscope objectives. The information can be used to minimize misalignments of an interferometer, compare the performance of lenses and offer objective means of assessing the potential lateral resolution of an instrument.

Paper Details

Date Published: 2 August 2004
PDF: 12 pages
Proc. SPIE 5531, Interferometry XII: Techniques and Analysis, (2 August 2004); doi: 10.1117/12.559843
Show Author Affiliations
Xavier Colonna de Lega, Zygo Corp. (United States)

Published in SPIE Proceedings Vol. 5531:
Interferometry XII: Techniques and Analysis
Katherine Creath; Joanna Schmit, Editor(s)

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