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Proceedings Paper

Seven years of x-ray fluorescence computed microtomography
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Paper Abstract

Since 1998 we have developed X-Ray fluorescence tomography for microanalysis. All aspects were tackled starting with the reconstruction performed by FBP or ART methods. Self-absorption corrections were added and combined with Compton, transmission and fluorescence tomographies to obtain fully quantitative results. Automatic "smart scans" minimized overhead time scanning/aligning non-cylindrical objects. The scans were performed step-by-step or continuously with no overhead time. Focusing went from 5 to 1 micron range, using FZP or CRL lenses, and finally KB bent mirrors which yield sub-micron high intensity beams. Recently, we have performed the first quantitative 3D fluo-tomography by helical scanning. We are now studying energy dependent fluo-tomography for chemically-sensitive imaging of the internal structure of samples. This chronology yielded the present level of sophistication for both experiments and data treatment and finally a method ready for wide dissemination among scientists.

Paper Details

Date Published: 26 October 2004
PDF: 11 pages
Proc. SPIE 5535, Developments in X-Ray Tomography IV, (26 October 2004); doi: 10.1117/12.558948
Show Author Affiliations
Alexandre S. Simionovici, Ecole Normale Superieure de Lyon (France)
European Synchrotron Radiation Facility (France)
Bruno Golosio, Univ. degli Studi di Sassari (Italy)
Marina V. Chukalina, Institute of Microelectronics Technology (Russia)
Andrea Somogyi, European Synchrotron Radiation Facility (France)
Laurence Lemelle, Ecole Normale Superieure de Lyon (France)

Published in SPIE Proceedings Vol. 5535:
Developments in X-Ray Tomography IV
Ulrich Bonse, Editor(s)

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