Since end of 2003 the TII-3D - the new contact topography measuring device for measuring aspherical and spherical surfaces - is available on market. Due to its novel technology, the system is specified to measure a large range with λ/10 accuracy, therefore being a very flexible tool for pre- and post-measurements in high quality zonal polishing processes like MRF. At the University of Applied Sciences Deggendorf a testing series has been carries out to compare the results of the TII-3D with CGH-interferometric measurements on aspherical surfaces. An analysis of the measurement errors is shown and ranking of the different metrology systems for production processes of high quality aspherical lenses is given.

Date Published: 14 October 2004
PDF: 10 pages
Proc. SPIE 5523, Current Developments in Lens Design and Optical Engineering V, (14 October 2004); doi: 10.1117/12.558899

Published in SPIE Proceedings Vol. 5523:
Current Developments in Lens Design and Optical Engineering V
Pantazis Z. Mouroulis; Warren J. Smith; R. Barry Johnson, Editor(s)