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Proceedings Paper

An investigation into nano-dimensional fractal film structures
Author(s): Igor N. Serov; Gennady N. Lukyanov; Vladimir I. Margolin; Nikita A. Potsar; Inga A. Soltovskaya; Valentin S. Fantikov
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Paper Abstract

This work is dedicated to experimental studies of the action of fraktal-matrix strukturizator “Aires” on the processes of increasing on the thin nano-dimensional films of copper, titanium and number of others. It is established that under the action of strukturizators it is possible to obtain films with the clearly expressed fraktal structure, moreover at different levels. Are given the results of a study with the aid of optics, SEM and AFM of the microscopy. As a result of a complex of the lead researches influence fractal-matrix strukturizators on the processes proceeding at condensation thin nano-dimensional films from vapor or the plasma environment with use of methods magnetron ionic - plasma spattering and thermal vacuum evaporation is revealed.

Paper Details

Date Published: 28 May 2004
PDF: 12 pages
Proc. SPIE 5401, Micro- and Nanoelectronics 2003, (28 May 2004); doi: 10.1117/12.558315
Show Author Affiliations
Igor N. Serov, Aires New Medial Technologies Foundation (Russia)
Gennady N. Lukyanov, St. Petersburg Institute of Fine Mechanics and Optics (Russia)
Vladimir I. Margolin, Aires New Medial Technologies Foundation (Russia)
St. Petersburg State Electroengineering Univ. (Russia)
Nikita A. Potsar, St. Petersburg State Electroengineering Univ. (Russia)
Inga A. Soltovskaya, Aires New Medial Technologies Foundation (Russia)
Valentin S. Fantikov, St. Petersburg State Electroengineering Univ. (Russia)

Published in SPIE Proceedings Vol. 5401:
Micro- and Nanoelectronics 2003
Kamil A. Valiev; Alexander A. Orlikovsky, Editor(s)

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