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Proceedings Paper

An analysis of in-process pattern inspection benefit-to-cost relationship
Author(s): Larry S. Zurbrick
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Paper Abstract

A model has been developed using process yields and costs in order to judge the benefit of performing multiple inspections during the manufacture of reticles that employ multiple writing steps in their manufacture. The model presented is forward looking in terms of judging whether an additional inspection step will incur added cost to the manufacturing process. For this forward looking model, only subsequent process step costs and prior process step yield to the proposed inspection point is required.

Paper Details

Date Published: 20 August 2004
PDF: 6 pages
Proc. SPIE 5446, Photomask and Next-Generation Lithography Mask Technology XI, (20 August 2004); doi: 10.1117/12.557729
Show Author Affiliations
Larry S. Zurbrick, KLA-Tencor Corp. (United States)

Published in SPIE Proceedings Vol. 5446:
Photomask and Next-Generation Lithography Mask Technology XI
Hiroyoshi Tanabe, Editor(s)

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