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Proceedings Paper

Design and fabrication of microlens by microfluidic deposition method
Author(s): Chin-Tai Chen; Chin-Long Chiu; Ji-Bin Horng
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Paper Abstract

The paper presents a new processing method for design and fabrication of microlens by microfluidic deposition, in which the lenses can be formed on the media with high precise location in the fabrication process. First we may apply physical vaporization deposition (PVD) or spin coating to fabricate a thin film; secondly, the hydrophilic pattern specified by the mask of lenses can be created by photolithography, where the special lens media is made herein. Finally, the liquid solution of lens material is deposited onto the predetermined location of the lens media by the drop-on-demand fluidic actuator; thus, the microlenses are consequently formed after the complete evaporation of solvent in the solution.

Paper Details

Date Published: 14 October 2004
PDF: 9 pages
Proc. SPIE 5523, Current Developments in Lens Design and Optical Engineering V, (14 October 2004); doi: 10.1117/12.557514
Show Author Affiliations
Chin-Tai Chen, Industrial Technology Research Institute (Taiwan)
Chin-Long Chiu, Industrial Technology Research Institute (Taiwan)
Ji-Bin Horng, Industrial Technology Research Institute (Taiwan)

Published in SPIE Proceedings Vol. 5523:
Current Developments in Lens Design and Optical Engineering V
Pantazis Z. Mouroulis; Warren J. Smith; R. Barry Johnson, Editor(s)

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