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Proceedings Paper

Volume and heterogeneous chemistry in Cl2/Ar inductively coupled plasma
Author(s): Alexander Efremov; Vladimir Svettsov; Chang-Il Kim
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Paper Abstract

Plasma parameters and chemical kinetics of Cl2/Ar plasma were investigated aimed at understanding the mechanism of Ar addition on mass composition of charged and neutral particles. The analysis was based on both experimental methods and plasma modeling. It was found that addition of Ar to Cl2 leads to deformation of the electron energy distribution function and to increase of the electron mean energy. Direct electron impact dissociation of Cl2 molecules represents the main source of chlorine atoms in plasma volume. The contributions of stepwise dissociation and ionization involving Ar metastable atoms were found to be negligible. Addition of Ar to Cl2 causes the decrease of both electron and ion densities due to the decrease of the total ionization rate and the acceleration of heterogeneous decay of charged particles.

Paper Details

Date Published: 28 May 2004
PDF: 8 pages
Proc. SPIE 5401, Micro- and Nanoelectronics 2003, (28 May 2004); doi: 10.1117/12.557001
Show Author Affiliations
Alexander Efremov, Ivanovo State Univ. of Chemistry and Technology (Russia)
Chung-Ang Univ. (South Korea)
Vladimir Svettsov, Ivanovo State Univ. of Chemistry and Technology (Russia)
Chang-Il Kim, Chung-Ang Univ. (South Korea)

Published in SPIE Proceedings Vol. 5401:
Micro- and Nanoelectronics 2003
Kamil A. Valiev; Alexander A. Orlikovsky, Editor(s)

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