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Proceedings Paper

Iron and molybdenum oxide formation at laser chemical vapor deposition of elements from carbonyls
Author(s): Sergay A. Mulenko
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Paper Abstract

Carbonyls of transition-metals Mo(CO)6, Fe(CO)5 were used for laser chemical vapor deposition (LCVD) of elements under the action of KrF laser radiation (λL = 248 nm) and Ar+ laser radiation (λL = 488 nm) on SiO2 and Si substrate surface. Rate constants of heterogeneous reaction of Mo and Fe atoms deposition were calculated while irradiating SiO2 and Si substrate surface. Element analysis of deposited films made with energy dispersive X-ray spectroscopy (EDXS) and Auger electron spectroscopy (AES) reflects that atomic concentration of C atoms was not equal to atomic concentration of O atoms owing to the existence of dissociative channel of adsorbed CO molecules on MO and Fe surface. From these data and average surface temperature, dissociation constants of CO molecules and C-O binding energies of adsorbed CO molecules were calculated.

Paper Details

Date Published: 2 April 2004
PDF: 8 pages
Proc. SPIE 5399, Laser-Assisted Micro- and Nanotechnologies 2003, (2 April 2004); doi: 10.1117/12.555547
Show Author Affiliations
Sergay A. Mulenko, Institute for Metal Physics (Ukraine)

Published in SPIE Proceedings Vol. 5399:
Laser-Assisted Micro- and Nanotechnologies 2003
Vadim P. Veiko, Editor(s)

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