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Proceedings Paper

Characterization of microelectromechanical (MEMS) HF-switches
Author(s): Maxim V. Shakhrai; Christoph Huth; Hans Joachim Quenzer; Thomas Lisec
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Paper Abstract

Microelectromechanical capacitive radiofrequency switches are considered. Design and technological process are reported. Switching characteristics and thermal behavior are investigated. Ways to improve the measured parameters are shown. The switches are prospective for wireless telecommunication systems, in particular for mobile communications.

Paper Details

Date Published: 5 April 2004
PDF: 4 pages
Proc. SPIE 5400, Seventh International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering, (5 April 2004); doi: 10.1117/12.555376
Show Author Affiliations
Maxim V. Shakhrai, St. Petersburg State Polytechnical Univ. (Russia)
Fraunhofer-Institut fur Siliziumtechnologie (Germany)
Christoph Huth, Fraunhofer-Institut fuer Siliziumtechnologie (Germany)
Hans Joachim Quenzer, Fraunhofer-Institut fuer Siliziumtechnologie (Germany)
Thomas Lisec, Fraunhofer-Institut fuer Siliziumtechnologie (Germany)


Published in SPIE Proceedings Vol. 5400:
Seventh International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering
Alexander I. Melker, Editor(s)

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