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Proceedings Paper

Polarization-controlled monolithic oxide-confined VCSELs
Author(s): Rainer Michalzik; Johannes M. Ostermann; Pierluigi Debernardi; Christof Jalics; Andrea Kroner; Martin Feneberg; Michael Riedl
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Paper Abstract

We report on advances in the fabrication and performance of monolithic 850 nm, linearly polarized vertical-cavity surface-emitting lasers (VCSELs) incorporating a semiconductor surface grating at the outcoupling facet. Depending on the grating parameters, the light is polarized either parallel or perpendicular to the grating grooves. Deep-etched gratings enable complete polarization pinning even in directions that are 45 degrees off the preferred crystal axes. On the other hand, such devices can show strong side-lobes in the far-field which may limit the available output power for some applications. Shallow-etched VCSELs with almost undistorted far-fields deliver output powers as high as 29 mW with about 12 dB orthogonal polarization suppression ratio. A combination of surface relief and grating is used to increase the transverse single-mode output power while maintaining polarization stability.

Paper Details

Date Published: 8 September 2004
PDF: 15 pages
Proc. SPIE 5453, Micro-Optics, VCSELs, and Photonic Interconnects, (8 September 2004); doi: 10.1117/12.554945
Show Author Affiliations
Rainer Michalzik, Univ. Ulm (Germany)
Johannes M. Ostermann, Univ. Ulm (Germany)
Pierluigi Debernardi, IEIIT, CNR (Italy)
Christof Jalics, Univ. Ulm (Germany)
Andrea Kroner, Univ. Ulm (Germany)
Martin Feneberg, Univ. Ulm (Germany)
Michael Riedl, Univ. Ulm (Germany)

Published in SPIE Proceedings Vol. 5453:
Micro-Optics, VCSELs, and Photonic Interconnects
Hugo Thienpont; Kent D. Choquette; Mohammad R. Taghizadeh, Editor(s)

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