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Proceedings Paper

Recent advancements in digital holographic microscopy and its applications
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Paper Abstract

Digital holograms recorded with a charge coupled device camera array are numerically reconstructed in amplitude and phase through calculation of the Fresnel-Kirchhoff integral. The flexibility offered by the reconstruction process in digital holography allows exploitation of new possibilities of application in microscopy. Through the reconstruction process we will show that it is possible to control image parameters as focus distance, image size and image resolution. We report on recent developments obtained in the numerical reconstruction process of holograms. Novel prospective of application of digital holography in single and multi-wavelengths operation either for display and metrological applications can be explored by those recent achievements. Examples of applications of digital holographic microscopy for characterizing silicon MEMS structures by adopting new procedures are illustrated and discussed.

Paper Details

Date Published: 10 September 2004
PDF: 11 pages
Proc. SPIE 5457, Optical Metrology in Production Engineering, (10 September 2004); doi: 10.1117/12.554755
Show Author Affiliations
Pietro Ferraro, Istituto Nazionale di Ottica Applicata (Italy)
Giuseppe Coppola, Istituto per la Microelettronica e Microsistemi, CNR (Italy)
Domenico Alfieri, Istituto Nazionale di Ottica Applicata (Italy)
Sergio De Nicola, Istituto di Cibernetica, CNR (Italy)
Andrea Finizio, Istituto di Cibernetica, CNR (Italy)
Giovanni Pierattini, Istituto di Cibernetica, CNR (Italy)

Published in SPIE Proceedings Vol. 5457:
Optical Metrology in Production Engineering
Wolfgang Osten; Mitsuo Takeda, Editor(s)

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